JPH0515067B2 - - Google Patents

Info

Publication number
JPH0515067B2
JPH0515067B2 JP59275777A JP27577784A JPH0515067B2 JP H0515067 B2 JPH0515067 B2 JP H0515067B2 JP 59275777 A JP59275777 A JP 59275777A JP 27577784 A JP27577784 A JP 27577784A JP H0515067 B2 JPH0515067 B2 JP H0515067B2
Authority
JP
Japan
Prior art keywords
probe
probes
test
plates
probe assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59275777A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61154137A (ja
Inventor
Seiichiro Sogo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KUROTANI NOBUKO
Original Assignee
KUROTANI NOBUKO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KUROTANI NOBUKO filed Critical KUROTANI NOBUKO
Priority to JP27577784A priority Critical patent/JPS61154137A/ja
Publication of JPS61154137A publication Critical patent/JPS61154137A/ja
Publication of JPH0515067B2 publication Critical patent/JPH0515067B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP27577784A 1984-12-27 1984-12-27 テストプロ−ブ組立体 Granted JPS61154137A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27577784A JPS61154137A (ja) 1984-12-27 1984-12-27 テストプロ−ブ組立体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27577784A JPS61154137A (ja) 1984-12-27 1984-12-27 テストプロ−ブ組立体

Publications (2)

Publication Number Publication Date
JPS61154137A JPS61154137A (ja) 1986-07-12
JPH0515067B2 true JPH0515067B2 (en]) 1993-02-26

Family

ID=17560253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27577784A Granted JPS61154137A (ja) 1984-12-27 1984-12-27 テストプロ−ブ組立体

Country Status (1)

Country Link
JP (1) JPS61154137A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0727936B2 (ja) * 1987-04-21 1995-03-29 東京エレクトロン株式会社 プロ−ブカ−ド
JP2634060B2 (ja) * 1988-04-28 1997-07-23 東京エレクトロン株式会社 プローブ装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755690Y2 (en]) * 1979-06-18 1982-12-01
JPS5654096A (en) * 1979-10-05 1981-05-13 Nippon Electric Co Device for inspecting printed board
JPS57115841A (en) * 1981-01-10 1982-07-19 Nec Corp Probing method
JPS58148935U (ja) * 1982-03-31 1983-10-06 日本電子材料株式会社 プロ−ブカ−ド
JPS58173841A (ja) * 1982-04-03 1983-10-12 Nippon Denshi Zairyo Kk プロ−ブカ−ド

Also Published As

Publication number Publication date
JPS61154137A (ja) 1986-07-12

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